IUPAC Name | ethanolate;tantalum(5+); |
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Molecular Weight | 406.25 |
Molecular Formula | Ta(OC2H5)5 |
Canonical SMILES | CCO[Ta](OCC)(OCC)(OCC)OCC |
InChI | 1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5,HSXKFDGTKKAEHL-UHFFFAOYSA-N |
InChI Key | HSXKFDGTKKAEHL-UHFFFAOYSA-N |
Melting Point | 21 °C (lit.) |
Application | Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods |
Storage | 2-8°C |
BeilsteinREAXYS Number | 3678999 |
EC Number | 228-010-2 |
Form | liquid |
MDL Number | MFCD00049785 |
Packaging | 25 g in stainless steel cylinder |
Quality Level | 100 |