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Tantalum(V) ethoxide

Tantalum(V) ethoxide
Catalog
ACM6074846
CAS
6074-84-6
Synonyms
PET,Pentaethoxytantalum,Pentaethyl tantalate,Tantalum pentaethoxide
IUPAC Nameethanolate;tantalum(5+);
Molecular Weight406.25
Molecular FormulaTa(OC2H5)5
Canonical SMILESCCO[Ta](OCC)(OCC)(OCC)OCC
InChI1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5,HSXKFDGTKKAEHL-UHFFFAOYSA-N
InChI KeyHSXKFDGTKKAEHL-UHFFFAOYSA-N
Melting Point21 °C (lit.)
ApplicationTantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods
Storage2-8°C
BeilsteinREAXYS Number3678999
EC Number228-010-2
Formliquid
MDL NumberMFCD00049785
Packaging25 g in stainless steel cylinder
Quality Level100

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