Boro-phospho-silicate Glass (BPSG), as the first layer of pre-metal dielectric (PMD) and inter-metal dielectric (IMD), has a wide range of applications in IC manufacturing. Due to the addition of boron-phosphorus impurities (B2O3, P2O5), it has a certain degree of fluidity like liquid under high temperature conditions. Therefore, the BPSG film has excellent hole filling ability, and can improve the planarization of the entire silicon wafer surface, thereby providing a larger process range for photolithography and subsequent processes. Alfa Chemistry is capable of preparing BPSG films on various wafers. Please contact us for more service information.
Borophosphosilicate Glass - BPSG
BPSG is a coating made of a mixture of oxygen and hydride of silicon (silane: SiH4), boron (diborane: B2H6) and phosphorus (phosphine: PH3), also called doped oxide film. It is similar to silica, with boron and phosphorus added to change its thermal properties. The addition of hydride greatly reduces the melting point of the glass, which makes this process meaningful when a wafer has limited thermal capabilities.
Undoped Silicate Glass - USG
Alfa Chemistry can also provide USG coating services on wafers. The properties of undoped silicate glass are similar to those of silicon dioxide and have a high deposition rate at low temperatures. Therefore, it can be easily deposited by plasma enhanced CVD (PECVD), HDP-CVD or SACVD. Silicate glass is most commonly used as an insulating layer and passivation layer in multilayer IMD applications.
Alfa Chemistry uses the following two methods to prepare BPSG films:
Plasma Enhanced Chemical Vapor Deposition (PECVD)
PECVD is a low temperature, high film density deposition technology. The energy from free electrons decomposes the reactive gas and forms a thin film on the wafer surface. The process of growing thin films by PECVD is as follows:
Subatmospheric Pressure Chemical Vapor Deposition (SACVD)
Alfa Chemistry provides customers with detailed technical reports:
All you have to do is place an order and send a sample. Our one-stop service will help you complete the whole project: sample processing-coating preparation-data analysis-project report.
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