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Ultra-fine detail semiconductor devices and flat panel displays are becoming more and more sophisticated and functional. The manufacture of semiconductor devices requires the use of high-purity wet chemicals for cleaning, removal, and rinsing.
Alfa Chemistry provides customers with a variety of high-purity wet chemical products used in the photolithography process in the production of semiconductor devices, which require rapid development capabilities in the ever-evolving world of semiconductor and flat panel display manufacturing.
Chemicals for the photolithography process we provide include:
These chemical reagents make photolithography technology possible and are essential in the patterning of microprocessor devices. We can guarantee ultra-low particles and trace metals to meet leading market demands.
Spin coating of photoresist, anti-reflective or polyimide coatings on microelectronic substrates often result in the formation of so-called edge beads. These deposits may also be wrapped around the edge of the substrate, and as a result, may also contaminate the back edge of the substrate.
EBR is a solvent mixture used to remove the photoresist on the edge and back of the substrate. It can be used to remove excess residue on the periphery of the substrate to clean the edge and level the edge to the same thickness as the surface area of the rest of the substrate.
Alfa Chemistry EBR benefit:
For more detailed information, please contact us.
Development is the step after exposure. During the development process, the more soluble part of the resist is dissolved away, exposing the final desired pattern. The developer is divided into positive tone and negative tone. Exposed area is removed when positive tone is used. Non-exposed area is removed when negative tone is used.
Our Product Range:
Both concentrates and prediluted are supplied.
Alfa Chemistry has a complete portfolio of removers to strip and dissolve resist, including:
The applications of the above products are as follows:
Reference
If you do not find the product or would like to request a quote, please contact us.