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Fused silica wafers are precision-engineered substrates widely used in the semiconductor, optics, and photonics industries. Unlike traditional crystalline silicon wafers, fused silica is amorphous and composed almost entirely of high-purity silicon dioxide (SiO2). This unique composition provides exceptional thermal stability, low thermal expansion, high optical transparency across a broad wavelength range, and outstanding chemical resistance. These properties make fused silica wafers indispensable in applications that require high performance under extreme conditions.
Fused silica wafers are available in several types, each designed to meet the specific requirements of different optical, semiconductor, and high-precision applications.
Ultraviolet grade fused silica wafer, commonly referred to as JGS1, is a high-purity synthetic quartz wafer optimized for UV optical applications. It provides excellent transmission in the ultraviolet range and exhibits superior thermal and chemical stability, making it ideal for semiconductor photolithography, UV laser systems, and other high-precision optical devices.
Optical grade fused quartz wafer, known as JGS2, is designed for applications in the visible and near-infrared spectrum. This grade features low absorption, high homogeneity, and minimal defects, ensuring reliable performance in lenses, windows, optical coatings, and other precision components used in photonics and general optical systems.
Full spectrum fused silica wafer, or JGS3, combines broad-spectrum transparency with high thermal and mechanical stability. Suitable for applications spanning UV to near-infrared wavelengths, it is widely used in scientific instrumentation, photonics, and advanced optoelectronic devices.
Alfa Chemistry is capable of providing you with fused quartz wafers in the three grades mentioned above.
The available specifications of fused silica wafers we can offer are as follows:
| Catalog Number | ACSEM-WS-0013 | ACSEM-WS-0014 | ACSEM-WS-0015 | ACSEM-WS-0016 | ACSEM-WS-0017 | ACSEM-WS-0018 | ACSEM-WS-0019 |
| Size | 2 inch | 3 inch | 4 inch | 6 inch | 8 inch | 10 inch | 12 inch |
| Diameter | 50.8 mm | 76.2 mm | 100 mm | 150 mm | 200 mm | 250 mm | 300 mm |
| Tolerance | ±0.2 mm | ±0.2 mm | ±0.2 mm | ±0.2 mm | ±0.2 mm | ±0.2 mm | ±0.2 mm |
| Thickness | 100 µm and above | 100 µm and above | 100 µm and above | 300 µm and above | 400 µm and above | 500 µm and above | 500 µm and above |
| Primary Reference Flat | 32.5 mm | 32.5 mm | 32.5 mm | 57.5 mm | Semi-notch | Semi-notch | Semi-notch |
| LTV (5 mmx5 mm) | < 0.5 µm | < 0.5 µm | < 0.5 µm | < 0.5 µm | < 0.5 µm | < 0.5 µm | < 0.5 µm |
| TTV | <2 µm | <2 µm | <2 µm | <3 µm | <3 µm | <5 µm | <5 µm |
| Bow | ±20 µm | ±20 µm | ±20 µm | ±30 µm | ±40 µm | ±40 µm | ±40 µm |
| Warp | ≤30 µm | ≤30 µm | ≤30 µm | ≤40 µm | ≤50 µm | ≤50 µm | ≤50 µm |
| PLTV (5 mmx5 mm) <0.4 µm | ≥95% | ≥95% | ≥95% | ≥95% | ≥95% | ≥95% | ≥95% |
| Surface Type | SSP/DSP | SSP/DSP | SSP/DSP | SSP/DSP | SSP/DSP | SSP/DSP | SSP/DSP |
| Surface Roughness | ≤1 nm | ≤1 nm | ≤1 nm | ≤1 nm | ≤1 nm | ≤1 nm | ≤1 nm |
* If the specifications you need are not available in the table, we can also offer customized services for you.
By offering a wide range of specifications and customization options, Alfa Chemistry empowers clients to leverage the exceptional properties of fused silica wafers for diverse applications. Contact Alfa Chemistry today to explore the full range of wafers and find solutions optimized for your projects.
If you do not find the product or would like to request a quote, please contact us.