Synthetic quartz tubes are critical materials widely used in semiconductor equipment due to their exceptional purity, thermal stability, and chemical resistance. Manufactured from high-purity synthetic quartz, these tubes are specifically designed to meet the stringent requirements of semiconductor processing environments, where even trace contamination can negatively affect wafer yield and device performance.
Compared with conventional quartz materials, synthetic quartz tubes offer significantly lower impurity element content, extremely low hydroxyl (OH) concentration, and superior optical and thermal properties. Their highly uniform structure minimizes bubble formation and internal defects, ensuring excellent stability under high-temperature processing conditions. In addition, synthetic quartz exhibits outstanding resistance to corrosive chemicals commonly used in semiconductor manufacturing, making it highly suitable for long-term use in demanding fabrication environments.
Our Capabilities
To support advanced semiconductor manufacturing, Alfa Chemistry provides synthetic quartz tubes with PPB-level impurity element control, and high geometric precision. In addition, customized dimensions and tolerances are available to meet the specific requirements of different equipment and processes. Through strict quality control and precision manufacturing, our synthetic quartz tubes help ensure reliable process performance, improved equipment stability, and enhanced semiconductor production efficiency.
Specification Parameters
QT-01 High-Purity Synthetic Quartz Large Tubes (Cat: ACSEM-QT-0001)
QT-02 Synthetic Quartz Tubes for Semiconductor Components (Cat: ACSEM-QT-0002)
Major Impurity Elements
| Content (ppm, wt%) | Li | Na | K | Mg | Ca | Cu | Al | Cr | Fe | Ti |
| QT-01 | <0.001 | <0.005 | <0.002 | <0.001 | <0.003 | <0.001 | <0.003 | <0.001 | <0.001 | <0.001 |
Product Features
| Model | Typical Dimensions (mm) | Application Area | Product Features |
| QT-01 | Outer diameter range: φ 200~350
Wall thickness range: 6~15
Maximum length: 1500 | Semiconductor-Furnace tubes, diffusion tubes, and related components | PPB-level impurity element content, extremely low OH content, bubble-free, high geometric precision, customizable dimensions |
Geometric Specifications and Accuracy
| Model | Outer Diameter OD (mm) | Wall Thickness WT (mm) | Outer Diameter Tolerance (mm) | Wall Thickness Tolerance (mm) | Non-Roundness (mm) | Wall Deviation (mm) | CSA Deviation | Bow Curvature (mm/m) | Length (mm) |
| QT-01 | 200~350 | 6~35 | ±1.50 | ±1.00 | ≤0.40 | ≤0.45 | ≤6.0% | ≤0.70 | ≤1500 |
Major Impurity Elements
| Content (ppm, wt%) | Li | Na | K | Mg | Ca | Cu | Al | Cr | Fe | Ti |
| QT-02 | <0.001 | <0.005 | <0.002 | <0.001 | <0.003 | <0.001 | <0.003 | <0.001 | <0.001 | <0.001 |
Geometric Specifications and Accuracy
| Model | QT-02 |
| Catalog Number | ACSEM-QT-0002-1 | ACSEM-QT-0002-2 | ACSEM-QT-0002-3 | ACSEM-QT-0002-4 |
| Outer Diameter OD (mm) | ≤10 | 10~40 | 40~60 | 60~90 |
| Wall Thickness WT (mm) | ≤1.5 | 1.0~10 | 2~15 | 2~30 |
| Outer Diameter Tolerance (mm) | ±0.2 | ±0.50 | ±0.80 | ±2.00 |
| Wall Thickness Tolerance (mm) | ±0.20 | ±0.30 | ±0.30 | ±3.00 |
| Non-Roundness (mm) | ≤0.08 | ≤0.15 | ≤0.40 | ≤0.40 |
| Wall Deviation (mm) | ≤0.08 | ≤0.15 | ≤0.45 | ≤0.45 |
| CSA Deviation | ≤3.0% | ≤6.0% | ≤6.0% | ≤6.0% |
| Bow Curvature (mm/m) | ≤0.40 | ≤0.70 | ≤0.70 | ≤0.70 |
| Length (mm) | ≤2000 | ≤3000 | ≤3000 | ≤2000 |
Note: Product dimensions and tolerances can be customized.
Appearance Specifications
The bubble standards for the tube wall are shown in the table below:
| Bubble Diameter (mm) | Wall Thickness |
≤3mm*
(no./m) | >3mm.. ≤10mm*
(no./m) | >10mm.. ≤25mm*
(no./m) | >25mm*
(no./m) |
| >0.2.. ≤0.5 | 1 | 3 | 14 | 21 |
| >0.5.. ≤1.0 | 0 | 1 | 6 | 9 |
*All bubbles are characterized by width, and the length shall not exceed 8 mm; bubbles with a diameter of ≤0.2 mm are not included in the statistics; open bubbles are not permitted in tubes with a wall thickness of ≤3 mm.
Inclusions with a width greater than 0.2 mm are not permitted.
No surface defects visible to the naked eye.
Choose Alfa Chemistry
Backed by reliable technical support and flexible customization capabilities, we work closely with customers to deliver quartz components that meet demanding application requirements. Our products are manufactured under strict quality control standards to ensure exceptional purity, dimensional accuracy, and long-term process stability. If you are interested in our products, please contact us immediately.
