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Electric Fused Quartz

Electric fused quartz is a quartz material manufactured through an electric fusion process in which high-purity quartz raw materials are melted at elevated temperatures and then processed into various forms and components, enabling the production of materials with excellent structural uniformity and controlled physical properties. Due to its stable composition and reliable structural properties, electric fused quartz is widely used in advanced industries such as semiconductor manufacturing, where it serves as a critical material for high-temperature and precision processing environments, supporting stable operation and consistent performance in demanding fabrication processes.

Our Capabilities

Alfa Chemistry has extensive experience in the production and customization of electric fused quartz materials for semiconductor applications. Manufactured with high-quality imported quartz sand and advanced electric fusion technology, our products exhibit excellent high-temperature resistance, low bubble content, and outstanding structural stability. In addition, we are capable of providing large-size electric fused quartz products to satisfy the growing demand for large and complex quartz components in advanced semiconductor equipment.

Our products are suitable for various quartz components used in both high-temperature and low-temperature zones during semiconductor processing, including quartz rings, quartz boats, and other precision quartz parts. Benefiting from their excellent thermal performance and stable material properties, they can maintain reliable operation in demanding semiconductor manufacturing environments. To better support different application requirements, Alfa Chemistry also offers flexible customization services covering dimensions, specifications, and processing needs according to customer requirements.

Specification Parameters

FQ-01 Electric Fused Quartz (Cat: ACSEM-FQ-0001)

Major Impurity Elements and Hydroxyl

Content (ppm, wt%)AlBCaCoCrCuFeKLiMgMnNaNiTiHydroxyl
FQ-01<16<0.1<1.0<0.06<0.03<0.2<1.0<0.9<0.5<0.62<0.06<1.0<0.27<2.2<30

Product Features

ModelTypical Dimensions (mm)Application AreasFeatures
FQ-01D1900 × H500Semiconductor, photovoltaic industry, etcHigh purity, low bubble content, and excellent high-temperature resistance

Mechanical Properties

ParameterUnitTest Result
Densityg/cm32.2
Mohs Hardness-6-7
Young's ModulusGPa70
Shear ModulusGPa30
Poisson's Ratio-0.17
Compressive StrengthGPa1.13
Tensile StrengthMPa49

Electrical Properties

ParameterUnitTest Result
Dielectric Constant (20 °C, 500 MHz)-3.9
Electrical Resistivity (20 °C)Ω·cm>1*1016

Thermal Properties

ParameterUnitTest Result
Strain Point (η=1014.5dPa·s)°C1100
Annealing Point (η=1013dPa·s)°C1210
Softening Point (η=107.6dPa·s)°C1720
Coefficient of Thermal Expansion (20~100 °C)×10-6/°C0.49
Coefficient of Thermal Expansion (20~300 °C)×10-6/°C0.55
Coefficient of Thermal Expansion (20~600 °C)×10-6/°C0.54
Coefficient of Thermal Expansion (20~900 °C)×10-6/°C-
Thermal Conductivity (20~900 °C)W/(m·K)1.4

Choose Alfa Chemistry

With strong technical expertise and strict quality control, Alfa Chemistry is dedicated to supplying high-performance electric fused quartz products for semiconductor applications. Whether you require standard quartz components or customized large-size electric fused quartz solutions, we have the professional expertise and manufacturing capabilities to meet your specific requirements. Please contact us today to receive prompt assistance, detailed product information, and customized solutions tailored to your application requirements. We look forward to establishing a stable and long-term partnership with you.

Our products and services are for research use only and cannot be used for any clinical purpose.

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