| Description | Atomic number of base material: 14 Silicon |
| IUPAC Name | Hydroxy-tris[(2-methylpropan-2-yl)oxy]silane |
| Molecular Weight | 264.43 |
| Molecular Formula | ((CH3)3CO)3SiOH |
| Canonical SMILES | CC(C)(C)O[Si](O)(OC(C)(C)C)OC(C)(C)C |
| InChI | InChI=1S/C12H28O4Si/c1-10(2,3)14-17(13,15-11(4,5)6)16-12(7,8)9/h13H,1-9H3 |
| InChI Key | HLDBBQREZCVBMA-UHFFFAOYSA-N |
| Boiling Point | 205-210 °C |
| Melting Point | 63-65 °C |
| Flash Point | >65 °C |
| Purity | 95%+ |
| Density | 0.92 g/cm³ |
| Appearance | Solid |
| Application | Precursors Packaged for Depositions Systems |
| Storage | Inert atmosphere,Room Temperature |
| Assay | ≥99.0% (GC) |
| Form | solid |
| MDL Number | MFCD00271024 |
| Packaging | 25 g in stainless steel cylinder |
| Quality Level | 100 |