Tetrakis(ethylmethylamido)titanium(IV)

Description	Atomic number of base material: 22 Titanium
Molecular Weight	280.28
Molecular Formula	[(CH3C2H5)N]4Ti
Canonical SMILES	CCN(C)[Ti](N(C)CC)(N(C)CC)N(C)CC
InChI	1S/4C3H8N.Ti/c41-3-4-2;/h43H2,1-2H3;/q4*-1;+4,LNKYFCABELSPAN-UHFFFAOYSA-N
InChI Key	LNKYFCABELSPAN-UHFFFAOYSA-N
Boiling Point	80 °C/0.1 mmHg (lit.)
Density	0.923 g/mL at 25 °C (lit.)
Solubility	core: titanium
Application	Precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD).
Storage	2-8°C
Assay	≥99.99%
Form	liquid
Grade	electronic grade
MDL Number	MFCD00799591
Packaging	5 g in ampule
Quality Level	100