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Hafnium(IV) tert-butoxide

Hafnium(IV) tert-butoxide
Catalog
ACM2172023-1
CAS
2172-02-3
Synonyms
Hafnium tetra-t -butoxide,Hafnium tetrakis(t -butoxide),Tetra-t -butoxyhafnium,Tetrakis(t -butoxy)hafnium
IUPAC Namehafnium(4+);2-methylpropan-2-olate
Molecular Weight470.94
Molecular FormulaHf[OC(CH3)3]4
Canonical SMILESCC(C)(C)O[Hf](OC(C)(C)C)(OC(C)(C)C)OC(C)(C)C
InChI1S/4C4H9O.Hf/c4*1-4(2,3)5;/h4*1-3H3;/q4*-1;+4,WZVIPWQGBBCHJP-UHFFFAOYSA-N
InChI KeyWZVIPWQGBBCHJP-UHFFFAOYSA-N
ApplicationHafnium tert-butoxide [Hf(OtBu)4] is a mononuclear; volatile; and highly promising precursor for the deposition of HfO2 and other hafnium doped thin films by vapor deposition techniques. The deposited films show high dielectric constant suitable for semiconductor devices.
Storageroom temp
Formliquid
MDL NumberMFCD00070458
Packaging10 g in stainless steel cylinder
Quality Level100

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