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Diphenyl-4-methylphenylsulfonium trifluoromethanesulfonate

Diphenyl-4-methylphenylsulfonium trifluoromethanesulfonate
Catalog
ACM81416377-1
CAS
81416-37-7
DescriptionFor photoresist for manufacturing semiconductor device, etc.
Molecular Weight426.47
Melting Point102°C
Solubilitywater : insoluble.
acetone, PGMEA (1-methoxy-2-propyl acetate) : soluble.
Appearancewhite
crystals

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