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| Description | Atomic number of base material: 14 Silicon |
|---|---|
| Molecular Weight | 236.48 |
| Molecular Formula | C4H16O4Si4 |
| Canonical SMILES | C[Si]1O[Si](O[Si](O[Si](O1)C)C)C |
| InChI | InChI=1S/C4H12O4Si4/c1-9-5-10(2)7-12(4)8-11(3)6-9/h1-4H3 |
| InChI Key | WZJUBBHODHNQPW-UHFFFAOYSA-N |
| Boiling Point | 134 °C |
| Melting Point | -69 °C |
| Flash Point | 76 °F |
| Purity | 95%+ |
| Density | 0.986 g/mL at 25 °C (lit.) |
| Solubility | Miscible with most organic solvents |
| Appearance | Colorless liquid |
| Application | 2, 4, 6, 8-Tetramethylcyclotetrasiloxane (TMCTS) is an important precursor for the deposition of polysiloxane, cyclic siloxane, silicon dioxide, oxycarbide thin films with low dielectric constant for microelectronics, semiconductors and other applications |
| Storage | 2-8 °C |
| Assay | ≥99.5% (GC) |
| BeilsteinREAXYS Number | 1775282 |
| EC Number | 219-137-4 |
| Form | liquid |
| Grade | deposition grade |
| MDL Number | MFCD00039567 |
| Packaging | 25 g |
| Quality Level | 100 |
| Refractive Index | 1.387 |
| Specific Gravity | 0.99 |