Description | 3000Å Thermal Oxide on medium resistivity 150mm silicon wafers has long been considered a common starting material for a variety of MEMS and Sensor Devices. Our ultra-pure Wet Thermal Oxidation process is designed to ensure that you receive the highest quality films. |
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Storage | room temp |
Dimension | 150mm |
Quality Level | 100 |
Refractive Index | 1.456 +/-0.02 @ 632.8nm |
Resistivity | 1-20 Ohm-cm |